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課程名稱 |
高科技廠房設施設計
High-tech Facility Design |
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開課學期 |
108-2 |
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授課對象 |
工學院 水利工程組 |
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授課教師 |
莊子壽 |
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課號 |
CIE5065 |
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課程識別碼 |
521 U3790 |
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班次 |
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學分 |
3.0 |
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全/半年 |
半年 |
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必/選修 |
選修 |
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上課時間 |
星期四A,B,c(18:25~) |
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上課地點 |
土研402 |
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備註 |
本課程中文授課,使用英文教科書。與張陸滿、陳柏翰合授
限學士班三年級以上
總人數上限：60人 |
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Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1082CIE5065_521U3790 |
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課程簡介影片 |
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核心能力關聯 |
核心能力與課程規劃關聯圖 |
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課程大綱
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為確保您我的權利,請尊重智慧財產權及不得非法影印
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課程概述 |
The purpose of this course is to provide basic design knowledge needed for fabrication facilities that support high-tech manufacturing and R&D. High-Tech includes, not limited to, the advanced technologies applied in the fields of micro-electronics, optoelectronics, precision equipment, telecommunication, nanotech, pharmaceutics, biotech, medical devices, animal experiment, and Aerospace. The processes undertaken in high-tech manufacturing plants and R&D labs require cleanrooms with extremely stringent environmental control.
The environmental control includes temperature and humidity requirements, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel health, safety and security and prevention of biohazard.
The focus of this course is on designing cleanroom and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra-pure clean room and ultra-pure process utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing fab/plant and research lab. Many advanced topics will be introduced, such as 300mm/12" fab, 5 nm manufacturing, IoT (Internet of Things), Green Fab, FinFET (Fin Field-Effect Transistor), LiFi (Light Fidelity), Intelligent Sensing, AMHS (Automated Material Handling System), smart factory, digital security...etc.
This course is intended to offer to undergraduate Juniors and Seniors, MS, EMBA & PhD students. Students in engineering, science, pharmacy, and life science will be exposed to fundamental theories and their applications in the design/build/certify of the high-tech manufacturing plants and research labs.
Academic faculty will teach basic theories and principles, then professional industrial experts will be invited to address the application of theories and principles in the real-world practices. The course contents will include lectures, home works, individual field trip report and a semester team project with an oral presentation and a written report, and/or a final examination.
A mandatory field trip to visit high-tech fabrication plant (fab), research lab, cleanroom or construction site will be arranged on 6/06, Saturday. Moreover, laboratory experiments may be provided to enable students for getting better understanding on the cleanroom where is the heart of high-tech M&R&D as well as major fab facility systems
The course will be taught in Chinese, however, most of lecture slides, handouts, other course requirements will be in English. All the 3 instructors are fluent in English. Students are welcome to ask question and/or turn in their field trip report, homework note, individual and group project report and final exam paper in English.
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課程目標 |
The course will enable the students to:
1. Differentiate the typical processes in semiconductor, biotech, medical devices, and pharmaceutical manufacturing and R&D.
2. Explain the interdisciplinary nature of high tech manufacturing and research
3. Perform architectural design for cleanroom and schematically layout factory.
4. Use the basic theories and principles to design systems for heating, ventilation and air conditioning (HVAC,) water/air treatment, noise and vibration mitigation.
5. Classify cleanrooms in terms of various international standards.
6. Specify the environmental control criteria for cleanroom in terms of temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials outgassing, and safe grounding.
7. Apply the knowledge in testing and commissioning cleanroom and its associated facilities.
8. Establish contamination control programs for constructing, operating, and maintaining the high-tech facilities.
9. Address the issues in automatically managing the emergency, safety, and security systems.
10. Link to the information sources for further studies in nano/micro fabrication and research. |
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課程要求 |
There is one group term project. The group term project tests the student understands of the principal concepts covered in the course within the context of a comprehensive “real-world” problem. It also provides an opportunity to develop skills for working in a project team context and communication skills. The group term project counts 60% of the final grade.
The term project report should conform to good engineering practices and should include, as a minimum, a title page, abstract, table of contents, introduction, theories, real-world practice, comparison between theory and practice, conclusion and references. A good quality report contains well-indicated reference pages and balanced arguments with solid evidences. Individual student’s contribution to the report should be clearly indicated.
A Final Exam is required on July 02, 2020. The Final Exam will be comprehensive and counted as 15% of “Total Grade.”
Another 15% is for attendance, class participation and homework . Two unexcused absences will result in a grade of 'Incomplete' or 'Flunk', depending on whether or not the student is considered to be passing in all other aspects at the time of the third absence. Except in emergency situation, a student must attend the field trip. Unexcused absences will result in a final grade of 'Incomplete.'
Meanwhile, each student will be individually required to submit a field trip report, either illustrated in Chinese or English. Then, prepare a maximum 5-page report (10%.) The page limitation imposes an organizational and summation burden on the student who takes the lecture note and field trip report. The writing must be concise and turn in two weeks after the lecture or field trip. Although figures, tables and graphs often help present useful concepts in less space, the illustrative demonstration of understating on the lecture or field trip will be weighted heavily. Simply download from the provided slides and/or class handouts is not acceptable.
The field trip report should conform to good engineering practices and should include, as a minimum, a title page, abstract, table of contents, introduction, theories behind the lecture, conclusion, and references. The report should be in the student’s own words, any citation should be clearly noted and/or referred.
Grading Scale of the Course:
1. Term Project, Group Presentation – 40% (10%, 10%, 20%)
2. Term Project, Individual Report – 20%
3. Final Exam – 15%
4. Field Trip Report and Lecture Note – 10%
5. Attendance,, Classroom Participation and Homework – 15%
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預期每週課後學習時數 |
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Office Hours |
備註： Teaching Assistants will have fixed time slots for students' consultation.
If student wants to get further consultation, the student is welcome to make appointment with each instructor.
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指定閱讀 |
There is no assigned textbook for this course. Handouts will be distributed along the classes. Students can check out the following books from main NTU Library for their own benefit:.
1. Geng, Hwaiyu, Semiconductor Manufacturing Handbook, McGraw-Hill, New York, 2005.
2. Whyte, W., Cleanroom Design, John Wiley, 2nd ed., New York 1999.
3. McQuiston/Parker/Spitler, Heating, Ventilating, and Air Conditioning, John Wiley, 6th ed., New York 2005.
4. Nishi, Y., Doering, K., and Wooldridge, T., Handbook of Semiconductor Manufacturing Technology, Marcel Dekker, New York, 2000.待補 |
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參考書目 |
1. Chang, C.Y., and Sze, S.M., ULSI Technology, McGraw-Hill Company, Inc., International Edition, 1996, New York.
2. Food and Drug Administration, Guideline on Sterile Drug Products Produced by Aseptic Processing, FDA, Information Branch, Rockville, Maryland, USA.
3. International Organization for Standards, ISO Standard 14644-4, part 4: Design, Construction, Start up, Geneva, Switzerland, 1999.
4. International Society of Pharmaceutical Engineering, Pharmaceutical Engineering Guide – A Guide for New Facilities, Volume 3: Sterile Manufacturing Facilities, ISPE, 2000.
5. Lurgi, S., Xu, J., and Zaslavsky, A., Future Trends in Microelectronics, Wiley, N.Y, 1999.
6. Mulhall, D., Our Molecular Future: How Nanotechnology, Robotics, Genetics, and Artificial Intelligence Will Transform Our World, Prometheus Books, Amherst, N.Y., 2002.
7. Nishi, Y., Doering, K., and Wooldridge, T., Handbook of Semiconductor Manufacturing Technology, Marcel Dekker, New York, 2000.
8. Scherge, M., Biological Micro- and Nanotribiology: Nature’s Solutions, Sprinker, New York, 2001.
9. 半導體製造技術，Quirk Serda 著，羅文雄、蔡榮輝 譯 ，滄海（2003）
10. 半導體奈米技術，龍文安 著，五南(2006)
11. 半導體英語，傳田精一 著，陳連春 譯，建興(2003)
12. 高科技廠務，顏登通，全華科技(2008) |
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評量方式
(僅供參考) |
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週次 |
日期 |
單元主題 |
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第1週 |
3/05 |
Course Introduction,
Fundamentals of Integrated Circuit Manufacturing Processes
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第2週 |
3/12 |
Fab Economics and High-tech Facilities Overview |
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第3週 |
3/19 |
Vibration, Airborne Molecular Contamination, and
EMI Mitigation
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第4週 |
3/26 |
Term Project Kickoff and 5D Tool Introduction |
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第5週 |
4/02 |
National Holiday, No Class |
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第6週 |
4/09 |
Site Master Planning and Code Compliance for Semiconductor Facilities |
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第7週 |
4/16 |
A Fab Project and Conceptual Design Process |
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第8週 |
4/23 |
No Midterm Exam., Mandatory Field Trip on 6/06 |
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第9週 |
4/30 |
Fab Layout and Automated Material Handling System. |
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第10週 |
5/07 |
Building and Structure Design |
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第11週 |
5/14 |
30% Design Review |
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第12週 |
5/21 |
Electrical, Cleanroom and HVAC System Design |
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第13週 |
5/28 |
Ultra Pure Water, Gases and Chemical System Design |
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第14週 |
6/04 |
Air abatement, Wastewater treatment and Waste Recycling Facilities
A mandatory Field Trip for Experiential Learning will be held to replace Midterm Exam at TSMC Facility Training Center, Taichung on 6/06, Saturday of this week. |
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第15週 |
6/11 |
60% Design Review Meeting and Concurrent Engineering |
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第16週 |
6/18 |
Group Term Project Presentation
(Final 100% Design Review) |
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第17週 |
6/25 |
National Holiday for Dragon Boat Festival, No Class. |
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第18週 |
7/02 |
Final Exam |
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